• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
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  • 优先权
    • 专利摘要:
    The invention relates to a hybrid structure (100) for a surface acoustic wave device comprising a useful layer (10) of piezoelectric material having a first free face (1) and a second face (2) disposed on a support substrate (20). whose coefficient of thermal expansion is less than that of the useful layer (10). The hybrid structure (100) is remarkable in that it comprises: • a trapping layer (30) interposed between the useful layer (10) and the support substrate (20); At least one functional interface (31) of determined roughness between the useful layer (10) and the trapping layer (30).
    公开号:FR3053532A1
    申请号:FR1656191
    申请日:2016-06-30
    公开日:2018-01-05
    发明作者:Gweltaz Gaudin；Isabelle Huyet
    申请人:Soitec SA；
    IPC主号:
    专利说明:

    (57) The invention relates to a hybrid structure (100) for a surface acoustic wave device comprising a useful layer (10) of piezoelectric material having a first free face (1) and a second face (2) disposed on a support substrate. (20) whose coefficient of thermal expansion is lower than that of the useful layer (10).
    The hybrid structure (100) is remarkable in that it comprises:
    a trapping layer (30) interposed between the useful layer (10) and the support substrate (20);
    at least one functional interface (31) of determined roughness between the useful layer (10) and the trapping layer (30).


    100 i
    HYBRID STRUCTURE FOR ACOUSTIC WAVE DEVICE
    AREA
    FIELD OF THE INVENTION
    The present invention relates to the field of surface acoustic wave devices. It relates in particular to a hybrid structure suitable for the manufacture of surface acoustic wave devices and to a method of manufacturing said hybrid structure.
    TECHNOLOGICAL BACKGROUND OF THE INVENTION
    Surface acoustic wave devices (“SAW” for “Surface Acoustic Wave” according to English terminology) use one or more interdigitated transducers developed on a piezoelectric substrate to convert electrical signals into acoustic waves and vice versa. Such SAW devices or resonators are often used in filtering applications. SAW radio frequency (RF) technology on piezoelectric substrate provides excellent performance such as high insulation and low insertion loss. For this reason, it is used for RF duplexers in wireless communication applications. However, to be more competitive compared to RF duplexers based on volume acoustic wave technology (“BAW” for “Bulk Acoustic Wave”), SAW RF devices require that the temperature stability of their frequency response be improved.
    The dependence of the operating frequency of SAW devices on the temperature, or the thermal frequency coefficient (“TCF” for “Temperature Coefficient of Frequency”), depends on the one hand on the variations in the spacing between the interdigitated electrodes of the transducers, which are generally due to the coefficients of thermal expansion ("CTE" for "Coefficient of Thermal of substrates
    Expansion ') relatively high piezoelectric used; on the other hand, the TCF depends on the thermal speed coefficient because the expansion or contraction of the piezoelectric substrate is accompanied by an increase or a decrease in the speed of the surface acoustic wave. To minimize the thermal frequency coefficient (TCF), an objective is therefore to minimize the expansion / contraction of the piezoelectric substrate, in particular in the surface area in which the acoustic waves will propagate.
    The article by K. Hashimoto, M. Kadota et al, “Recent development of temperature compensated SAW devices”, IEEE Ultrason. Nice. 2011, pages 79 to 86, 2011, gives an overview of the approaches commonly used to overcome the problem of dependence on the temperature of the frequency response of SAW devices.
    One approach consists in using a hybrid substrate, for example composed of a layer of piezoelectric material placed on a silicon substrate. The low CTE of silicon makes it possible to limit the expansion / contraction of the piezoelectric layer in temperature. In the case of a piezoelectric layer of Lithium Tantalate (LiTaO3), the article cited above indicates that a ratio of 10 between the thickness of LiTaO3 and the thickness of the silicon substrate makes it possible to improve the coefficient of thermal frequency (TCF).
    One of the drawbacks of such a hybrid substrate comes from the presence of spurious acoustic waves (called “spurious acoustic modes” in the article “Characterization of bonded wafer for RF filters with reduced TCF”, BPAbbott et al, Proc 2005 IEEE International Ultrasonics Symposium, Sept 19-21, 2005, pp.926-929) which negatively impact the frequency characteristics of the resonator produced on the hybrid substrate. These parasitic resonances are notably linked to parasitic reflections on the underlying interfaces, including in particular the interface between LiTaO3 and silicon. One solution to reduce these parasitic resonances is to increase the thickness of the LiTaO3 layer; this supposing also to increase the thickness of the Si substrate in order to preserve the improvements in TCF, the total thickness of the hybrid substrate is then no longer compatible with the needs for reducing the thickness of the final components, in particular to address the market cell phones. Another solution, proposed by K.Hashimoto, is to roughen the lower surface of the layer of LiTaO3 so as to limit the reflections of the acoustic wave thereon. Such roughness represents a difficulty in managing when a direct bonding process, requiring very smooth surfaces to be assembled, is used for the production of the hybrid substrate.
    Another disadvantage of a hybrid substrate according to the state of the art comes from the presence of the support made of semiconductor silicon material, which even highly resistive, is capable of containing mobile charges and of impacting the performance of the device, in particular by increasing the insertion losses and the distortions (linearity) of the RF signal compared to a solid piezoelectric substrate.
    OBJECT OF THE INVENTION
    An object of the present invention is to remedy all or part of the drawbacks of the prior art. An object of the invention is to provide a hybrid structure allowing the reduction and / or elimination of said parasitic acoustic waves and ensuring stable performance for devices operating at high frequencies.
    BRIEF DESCRIPTION OF THE INVENTION
    The present invention relates to a hybrid structure for a surface acoustic wave device comprising a useful layer of piezoelectric material having a first free face and a second face disposed on a support substrate whose coefficient of thermal expansion is lower than that of the useful layer, the hybrid structure being characterized in that it comprises:
    • a trapping layer interposed between the useful layer and the support substrate;
    • at least one functional interface of determined roughness between the useful layer and the trapping layer.
    The trapping layer of the hybrid structure according to the invention effectively traps the mobile electrical charges potentially generated in the support substrate during the operation of the SAW RF device produced on said hybrid structure. The RF performances (linearity, insertion losses) thus reach a good level, comparable or even superior to that of technologies on massive piezoelectric substrates.
    The functional interface of determined roughness allows an effective diffusion of the acoustic waves likely to propagate deep in the useful layer, thus avoiding their parasitic reflections which are known to negatively impact the quality of the signal of the SAW device. This diffusion of the acoustic waves is made more effective because the functional interface is localized between the useful layer and the trapping layer: in fact, in addition to its qualities of trapping of mobile charges, the trapping layer makes it possible to effectively screen the 'underlying interface with the support substrate, the latter contributing in hybrid structures to reflect acoustic waves.
    According to advantageous characteristics of the invention, taken alone or in combination:
    • the trapping layer is directly in contact with the support substrate;
    • the trapping layer is formed from a material chosen from amorphous silicon, poly-crystalline silicon, amorphous or poly-crystalline germanium;
    • the trapping layer is formed by implantation in
    a surface layer of substrate support or by engraving and structuring of the layer superficial of support substrate; the determined roughness of 1 ' functional interface has a peak amplitude at hollow better than 0.3
    micron, advantageously greater than or equal to 0.5 micron, or even 1 micron;
    • the functional interface is formed by the interface between the useful layer and the trapping layer, the second face of the useful layer having the determined roughness;
    • the functional interface is formed by the interface between a first intermediate layer, disposed on the second face of the useful layer, and the trapping layer; the trapping layer having the determined roughness;
    • the first intermediate layer comprises a material chosen from silicon oxide, silicon nitride, silicon oxynitride, a material of the same nature as that constituting the useful layer;
    • the hybrid structure includes a second functional interface;
    The second functional interface is formed by the interface between the useful layer and a second intermediate layer disposed on the first intermediate layer, the second functional interface having a second determined roughness whose peak-to-hollow amplitude is greater than 0, 1 micron;
    • the second intermediate layer comprises a material chosen from silicon oxide, silicon nitride, silicon oxynitride, a material of the same nature as that constituting the useful layer;
    • the first intermediate layer and the second intermediate layer are made of the same material;
    • the useful layer comprises a piezoelectric material chosen from lithium tantalate (LiTaO3), lithium niobate (LiNbO3), quartz, zinc oxide (ZnO), aluminum nitride (AIN);
    • the support substrate is a solid substrate or a composite substrate comprising at least one virgin layer or comprising all or part of microelectronic components.
    The present invention also relates to a surface acoustic wave device comprising a hybrid structure as above.
    The present invention further relates to a method of manufacturing a hybrid structure for a surface acoustic wave device comprising:
    • A step of supplying a useful layer of piezoelectric material comprising a first face and a second face having a determined roughness;
    • A step of supplying a support substrate having a coefficient of thermal expansion lower than that of the useful layer;
    • An assembly step to arrange the useful layer on the support substrate;
    The method is remarkable in that it comprises, prior to the assembly step, a step of forming a trapping layer on the second face of the useful layer, the interface between the trapping layer and the layer useful forming a functional interface of determined roughness; the assembly step takes place between the trapping layer and the support substrate.
    The present invention also relates to another method of manufacturing a hybrid structure for a surface acoustic wave device comprising:
    • A step of supplying a useful layer of piezoelectric material comprising a first face and a second face;
    • A step of supplying a support substrate having a coefficient of thermal expansion lower than that of the useful layer;
    • An assembly step to arrange the useful layer on the support substrate;
    The process is remarkable in that it includes, prior to the assembly step:
    • A step of forming a trapping layer, having a determined roughness, on the support substrate;
    • A step of forming a first intermediate layer on the trapping layer, the interface between the trapping layer and the first intermediate layer forming a functional interface of determined roughness.
    According to advantageous characteristics of this manufacturing process, taken alone or in combination:
    • the assembly step takes place between the first intermediate layer and the second face of the useful layer;
    The process for manufacturing a hybrid structure comprises, prior to the assembly step, a step of forming a second intermediate layer on the second face of the useful layer which has a second determined roughness, step d 'assembly taking place between the first intermediate layer and the second intermediate layer; the interface between the useful layer and the second intermediate layer forms a second functional interface.
    BRIEF DESCRIPTION OF THE DRAWINGS
    Other characteristics and advantages of the invention will emerge from the detailed description which follows with reference to the appended figures in which:
    Figures 1 to 3 show hybrid structures according to the invention;
    Figure 4 shows a surface acoustic wave device according to the invention;
    FIGS. 5a to 5e, 6a to 6e and 7a to 7e show methods of manufacturing hybrid structures, in accordance with the invention.
    DETAILED DESCRIPTION OF THE INVENTION
    In the descriptive part, the same references in the figures may be used for elements of the same nature.
    The figures are schematic representations which, for the sake of readability, are not to scale. In particular, the thicknesses of the layers along the z axis are not to scale with respect to the lateral dimensions according to the
    axes x and y. As illustrated on the figure 1, the invention concerned a structure hybrid 100 for acoustic wave device of area including a layer useful 10 of material
    piezoelectric having a first free face 1 and a second face 2. The useful layer 10 comprises a piezoelectric material chosen, for example, from lithium tantalate (LiTaO3), lithium niobate (LiNbO3), quartz, l zinc oxide (ZnO), aluminum nitride (AIN).
    ίο
    The useful layer 10 is placed on a support substrate 20 whose coefficient of thermal expansion is lower than that of the useful layer 10. The support substrate 20 is, for example, formed from silicon or germanium.
    The hybrid structure 100 according to the invention also comprises a trapping layer 30 interposed between the useful layer 10 and the support substrate 20. By trapping layer is meant a layer capable of trapping the mobile electric charges likely to be present in the support substrate 20. As an example, the trapping layer 30 is formed from a material chosen from amorphous silicon, poly-crystalline silicon, amorphous or poly-crystalline germanium. The trapping layer 30 may also be formed by a technique or a combination of techniques including:
    implanting ions into a surface layer of the support substrate 20; for a silicon substrate, an implantation for example of argon, silicon or nitrogen ions can be carried out to generate a disturbed surface layer, capable of trapping mobile charges coming from the support substrate 20;
    or by etching and structuring a surface layer of the support substrate 20; for example, by mechanical or wet or dry chemical etching, inducing a structuring of the surface, a preferred trapping site for mobile charges coming from the support substrate 20.
    The thickness of the trapping layer 30 may be between a few tens of nm and a few microns, or even a few tens of microns.
    Advantageously, the trapping layer 30 is directly in contact with the support substrate 20, which allows efficient trapping of the mobile charges generated in the support substrate 20.
    The hybrid structure 100 according to the invention further comprises at least one functional interface 31 of determined roughness between the useful layer 10 and the trapping layer 30. The roughness of the functional interface 31 is defined by the maximum peak-to-amplitude. -hollow, measured for example by mechanical or optical profilometry, on measurement profiles of the order of 50 to 500 microns or measurement surfaces of the order of 50x50 to 500x500 qm2. Advantageously, the determined peak-to-hollow roughness is greater than 0.3 microns. Advantageously, it is even greater than or equal to 0.5 micron, or even 1 micron. It is preferably between 0.3 and 5 microns.
    Also advantageously, the spectral density (PSD) of the roughness of the functional interface 31 covers all or part of the spectral band of parasitic wavelengths which it is sought to eliminate. Preferably, the determined roughness has spatial wavelengths and an amplitude at least equal to a quarter of the parasitic wavelengths.
    The determined roughness of the functional interface 31 can therefore be adapted in amplitude and potentially in spectral density as a function of the frequency of the acoustic waves of the SAW device which will be manufactured on the hybrid structure 100, for its ability to efficiently diffuse the acoustic waves susceptible to propagate in the useful layer 10.
    The trapping layer 30 of the hybrid structure 100 according to the invention effectively traps the mobile electrical charges potentially generated in the support substrate 20 during the operation of the SAW RF device produced on the first face 1 of said hybrid structure 100. RF performance ( linearity, insertion losses) thus reach a very good level, comparable or even higher than that of technologies on massive piezoelectric substrates.
    The functional interface 31 of determined roughness allows efficient diffusion of the acoustic waves capable of propagating deep into the useful layer 10, thus avoiding their spurious reflections, which are known to negatively impact the quality of the signal of the SAW device.
    According to a first embodiment, illustrated in FIG. 1, the functional interface 31 is formed by the interface between the useful layer 10 and the trapping layer 30.
    According to a second embodiment, illustrated in FIG. 2, the functional interface 31 is formed by the interface between a first intermediate layer 40, disposed on the second face 2 of the useful layer 10, and the trapping layer 30. By way of example, the first intermediate layer 40 may comprise a material chosen from silicon oxide, silicon nitride, silicon oxynitride or else a material of the same nature as the useful layer.
    These two embodiments are advantageous in that the trapping layer 30 makes it possible to distance and screen the underlying interface with the support substrate 20, the latter being a strong contributor, in the usual hybrid structures, to the reflection of the acoustic waves propagating in the volume of the useful layer 10. The interface with the support substrate 20 is screened in the sense that the majority, if not all, of the acoustic waves reaching the functional interface 31 will be effectively diffused by the latter and thus never reach this interface.
    According to a third embodiment, illustrated in FIG. 3, the hybrid structure 100 comprises a second functional interface 32 having a second determined roughness, the peak-to-hollow amplitude of which is greater than 0.1 micron. It is preferably between 0.1 and 5 microns. Note that the second functional interface 32 may have a second determined roughness different from the determined roughness of the first functional interface 31, both in amplitude and in spectral density.
    Advantageously, the spectral densities can be chosen to cover in a complementary manner the spectral band of wavelengths of the parasitic waves which it is desired to eliminate.
    The second functional interface 32 is formed by the interface between the useful layer 10 and a second intermediate layer 50 disposed on the first intermediate layer 40. By way of example, the second intermediate layer 50 comprises a material chosen from oxide of silicon, silicon nitride, silicon oxynitride; it can also include a material of the same kind as that constituting the useful layer 10: for a useful layer 10 of LiTaO3, the second intermediate layer 50 may for example consist of a layer of deposited amorphous LiTaO3.
    According to an advantageous variant of this third embodiment, the first 40 and second 50 intermediate layers are formed from the same material; thus, the interface between these two layers contributes little or no to spurious reflections, due to the absence of difference in acoustic impedance between the two layers.
    In the various embodiments described, the support substrate is a solid substrate. Alternatively, it may consist of a composite substrate comprising at least one virgin layer or a structured layer, comprising all or part of micro-electronic components; these configurations are particularly advantageous for producing co-integrated systems, including surface acoustic wave devices in and on the useful layer 10, and components (switches, amplifiers, other filters, etc.) in the support substrate.
    The invention also relates to a surface acoustic wave device 200 comprising a hybrid structure 100, illustrated in FIG. 4. The device 200 comprises for example interdigitated metal electrodes 201 on the first face 1 of the useful layer 10, between which will propagate the acoustic wave.
    The hybrid structure 100 is particularly suitable for the manufacture of surface acoustic wave devices 200 using acoustic wave frequencies between 700MHz and 3GHz.
    The invention also relates to a method of manufacturing a hybrid structure 100 for a surface acoustic wave device 200, which will be described with reference to FIGS. 5 to 7.
    The manufacturing method firstly comprises a step of supplying a useful layer 10 of piezoelectric material comprising a first face 1 and a second face 2 having a determined roughness. Said roughness is defined by the maximum peak-to-hollow amplitude, measured for example by mechanical or optical profilometry, on measurement profiles of the order of 50 measurement surfaces of the order of at 500 microns or 50 × 50 to 500x500 qm2.
    Advantageously, the determined roughness is greater than 0.3 microns, or even greater than or equal to 0.5 microns, or even even greater than 1 micron. Preferably, it is even between 0.3 and 5 microns.
    Also advantageously, the spectral density of the roughness of the functional interface 31 covers all or part of the spectral band of wavelengths of the parasitic waves which it is sought to eliminate.
    Preferably, the determined roughness has spatial wavelengths and an amplitude at least equal to a quarter of the parasitic wavelengths.
    The determined roughness of the functional interface 31 can therefore be adapted in amplitude and potentially in spectral density as a function of the frequency of the acoustic waves of the SAW device which will be manufactured on the hybrid structure 100, for its ability to efficiently diffuse the acoustic waves susceptible to propagate in the useful layer 10.
    The determined roughness can be achieved on the second face 2 by mechanical lapping techniques, mechanical-chemical polishing, wet or dry chemical etching, or a combination of these different techniques. The objective is to create on the second face 2 of the useful layer 10 a uniform roughness over the entire face, of determined amplitude. By way of example, such roughness can be obtained by the typical treatments of frosted rear faces of the wafers (lithium tantalate, lithium niobate, etc.) used in the semiconductor industry.
    As stated previously and without being limiting, the useful layer 10 comprises a piezoelectric material chosen from lithium tantalate (LiTaO3), lithium niobate (LiNbO3), quartz, zinc oxide (ZnO), nitride aluminum (AIN).
    According to an advantageous embodiment, the useful layer 10 is included in a donor substrate 11, having a second face 2 of determined roughness and a first face 1 '(FIG. 5a).
    The manufacturing method according to the invention also comprises a step of forming a trapping layer 30 on the second face 2 of the useful layer 10, or of the donor substrate 11 (FIG. 5b). The interface between the trapping layer 30 and the useful layer 10 (or the donor substrate 11) forms a functional interface 31 of determined roughness. Advantageously, the trapping layer 30 is formed from a material chosen from amorphous silicon, polycrystalline silicon, amorphous or poly-crystalline germanium. The trapping layer 30 can be produced by known techniques of chemical deposition (PECVD, LPCVD, etc.).
    The trapping layer 30 typically has a thickness of between a few tens of nm and a few microns, or even a few tens of microns.
    Advantageously, the step of forming the trapping layer 30 comprises a step of smoothing the free surface of the trapping layer 30, consisting for example of chemical mechanical polishing, smoothing etching by plasma or wet chemical attack. Preferably, the free surface of the trapping layer 30 will have a low roughness (typically <0.5 nm RMS, measured by atomic force microscopy) and good flatness, for a subsequent assembly step.
    The manufacturing process also includes a step of supplying a support substrate 20 (FIG. 5c) having a coefficient of thermal expansion lower than that of the useful layer 10. Advantageously, the support substrate 20 is made of silicon, this material being widely available and compatible with the semiconductor industry.
    molecular assembly
    Alternatively, it may also be made of germanium or other material compatible with the subsequent stages of the method and of the development of the surface acoustic wave device.
    The manufacturing process then comprises an assembly step for placing the donor substrate 11 (or the useful layer 10) on the support substrate 20 (FIG. 5d). The assembly step takes place between the trapping layer 30 and the support substrate 20, this is why the surface properties of the trapping layer 30 and of the support substrate 20 must be properly controlled. Advantageously, the step comprises direct bonding by adhesion. This bonding technique is preferred in that it does not require the use of an additional layer of material.
    Alternatively, the assembly step may include an adhesive bonding, a metallic bonding, an anodic bonding, or any other kind of bonding known from the state of the art and compatible with the intended application.
    Advantageously, the assembly step comprises, prior to bonding, a cleaning sequence to ensure a good level of cleanliness (removal of particles, hydrocarbon and metallic contaminants, etc.) on the surfaces before bonding.
    According to a variant of the method, a layer of the same kind as the trapping layer 30 can be deposited on the support substrate 20 prior to the assembly step, and will be prepared with a view to being bonded to the trapping layer 30. Indeed, depending on the nature of the trapping layer 30 and that of the support substrate 20, it may be advantageous, in particular in the case of direct bonding by molecular adhesion, to form a bonding interface between two materials of the same kind.
    To consolidate the bonding interface, the bonded hybrid structure 101 can be subjected to a heat treatment. It should be noted that the materials of the donor substrate 11 (or of the useful layer 10) and of the support substrate 20 have very different coefficients of thermal expansion, the heat treatment applied must therefore remain at a temperature below the damage temperature. or breakage of the bonded structure 101. The temperature range is typically between a few tens of degrees and 500 ° C.
    In the case illustrated in FIGS. 5a to 5e, where the useful layer 10 is included in a donor substrate 11, the manufacturing method further comprises a step of thinning the donor substrate 11 (FIG. 5e) to form the useful layer 10 and the first face 1, on which the surface acoustic wave devices will be developed.
    This thinning step can be carried out using the various techniques known from the prior art, in particular:
    • the Smart-Cut® process, particularly suitable for the formation of very fine useful layers (typically of thickness less than or equal to 1 micron): it is based on an implantation of gaseous species in the donor substrate 11, at the level of its second face 2, prior to the assembly step, to form a weakened buried plane; after assembly, the donor substrate 11 will separate along the weakened plane, so as to leave only the useful layer 10 integral with the support substrate 20.
    • mechanical-chemical thinning processes, including mechanical running-in, mechanical-chemical polishing and chemical etching, suitable for the formation of useful layers of thicknesses between a few microns and a few tens or even hundreds of microns.
    At the end of this manufacturing process, a hybrid structure 100 according to the invention is obtained (FIG. 5e).
    The invention relates to another method of manufacturing a hybrid structure 100 for a surface acoustic wave device comprising firstly a step of supplying a useful layer 10 of piezoelectric material comprising a first face 1 and a second face 2.
    As stated previously and without being limiting, the useful layer 10 comprises a piezoelectric material chosen from lithium tantalate (LiTaO3), lithium niobate (LiNbO3), quartz, zinc oxide (ZnO), nitride aluminum (AIN).
    According to an advantageous embodiment, the useful layer 10 is included in a donor substrate 11, having a second face 2 and a first face 1 '(FIG. 6a).
    The manufacturing process also includes a step of supplying a support substrate 20 having a coefficient of thermal expansion lower than that of the useful layer 10. Advantageously, the support substrate 20 is made of silicon, this material being widely available and compatible with semiconductor industry. As mentioned above, it may alternatively be formed or include germanium or other material compatible with the subsequent manufacturing steps.
    The manufacturing process also includes a step of forming a trapping layer 30 on the support substrate 20 (FIG. 6b). The trapping layer 30 has a determined roughness.
    Advantageously, the trapping layer 30 is formed from a material chosen from amorphous silicon, poly-crystalline silicon, amorphous or poly-crystalline germanium. It can be produced by known techniques of chemical deposition (CVD).
    The trapping layer 30 may also be formed by a technique or a combination of techniques including:
    implanting ions into a surface layer of the support substrate 20; for a silicon substrate, an implantation for example of argon, silicon, nitrogen ions, etc. may be carried out to generate a disturbed surface layer, capable of trapping mobile charges coming from the support substrate 20;
    or by etching and structuring a surface layer of the support substrate 20; for example, by mechanical or wet or dry chemical etching, inducing a structuring of the surface, a preferred trapping site for mobile charges coming from the support substrate 20.
    The trapping layer 30 can have a thickness of between a few tens of nm and a few microns, or even a few tens of microns.
    The roughness of the free surface of the trapping layer 30, after its formation on the support substrate 20, is defined by the maximum peak-to-hollow amplitude, measured for example by mechanical or optical profilometry, on measurement profiles of on the order of 50 to 500 microns or measurement areas on the order of 50x50 to 500x500 qm2. Advantageously, the determined roughness is greater than 0.3 microns, or even greater than or equal to 0.5 microns, or even even greater than or equal to 1 micron. It is preferably between 0.3 and 5 microns.
    Also advantageously, the spectral density of the roughness of the functional interface 31 covers all or part of the spectral band of wavelengths of the parasitic waves which it is sought to eliminate. Preferably, the determined roughness has spatial wavelengths and an amplitude at least equal to a quarter of the parasitic wavelengths.
    The determined roughness can be obtained on the free surface of the trapping layer 30, either directly after deposition of the layer, or by mechanical lapping techniques, mechanical-chemical polishing, wet or dry chemical etching, or a combination of these different techniques. The objective is to create a uniform roughness of determined amplitude on the free surface of the trapping layer 30. For example, such roughness can be obtained by treatments of the “acid etch” or “alkali etch” type carried out for the treatment of the etched rear faces of the silicon wafers used in the semiconductor industry. According to another example, the determined roughness of the free surface of the trapping layer 30 can be obtained by mechanical lapping (typically with a diamond wheel of grain 2000) then wet chemical etching (typically by TMAH) of the surface of the support substrate 20 , before depositing a trapping layer 30 of poly-crystalline silicon; the free surface of the trapping layer 30 after deposition on the support substrate 20 then has the determined roughness of the order of 0.5 microns peak-to-hollow (FIG. 6b ′).
    The manufacturing process then comprises a step of forming a first intermediate layer 40 on the trapping layer 30. The interface between the trapping layer 30 and the first intermediate layer 40 forms the functional interface 31 of determined roughness. The first intermediate layer 40 may comprise a material chosen from silicon oxide, silicon nitride, silicon oxynitride, or a material of the same nature as the useful layer
    10. It can be produced by chemical deposition. Advantageously, a smoothing step (for example, chemical mechanical polishing) is carried out on the free surface of the first intermediate layer 40, with a view to the subsequent step of assembly on the donor substrate 11 (or the useful layer 10) . This option is particularly suitable when the subsequent assembly step includes bonding by molecular adhesion.
    The first intermediate layer 40 can also comprise a polymer type material, which can, for example, be deposited by centrifugation. The advantage of this type of material is that smoothing can be done directly during deposition. This option is particularly suitable when the subsequent assembly step includes adhesive bonding.
    The manufacturing process finally comprises an assembly step making it possible to arrange the donor substrate 11 (or the useful layer 10) on the support substrate 20; in particular, the assembly takes place between the first intermediate layer 40 and the second face 2 of the donor substrate 11 (FIG. 6d).
    Advantageously, the assembly step comprises direct bonding by molecular adhesion: this bonding technique is advantageous in that it does not require the use of an additional layer of material. Alternatively, the assembly step may include an adhesive bonding, a metallic bonding, an anodic bonding, or any other kind of bonding known from the state of the art and compatible with the intended application. Advantageously, the assembly step comprises, prior to bonding, a cleaning sequence to ensure a good level of cleanliness (removal of particles, hydrocarbon and metallic contaminants) on the surfaces before bonding.
    To consolidate the bonding interface, the bonded hybrid structure 101 can be subjected to a heat treatment, at low or medium temperature to avoid damaging the hetero-structure: typically, between a few tens of degrees and 500 ° C.
    In the case, illustrated in FIGS. 6a to 6e, where the useful layer 10 is included in a donor substrate 11, the manufacturing method further comprises a step of thinning the donor substrate 11 (FIG. 6e) to form the useful layer 10 and the first face 1, on which the surface acoustic wave devices will be developed.
    This thinning step can be done using the various techniques known from the prior art, as previously mentioned.
    At the end of this manufacturing process, a hybrid structure 100 is obtained according to the invention (FIG. 6e).
    According to a variant of the aforementioned manufacturing method, illustrated in FIGS. 7a to 7e, the second face 2 of the useful layer 10 (or of the donor substrate 11, in the case where the useful layer 10 is included in a donor substrate) has a second determined roughness (Figure 7a). The peak-to-hollow amplitude of the second determined roughness is advantageously greater than 0.1 micron.
    This variant of the manufacturing process comprises a step of forming a second intermediate layer 50 on the second face 2 of the useful layer 10 or of the donor substrate 11, as illustrated in FIG. 7b. The second intermediate layer 50 may comprise a material or a stack of materials chosen from silicon oxide, silicon nitride, silicon oxynitride. The second intermediate layer 50 may also comprise a material of the same kind as that constituting the useful layer 10, in order to limit the problems linked to the differences in thermal expansion.
    The interface between the useful layer 10 and the second intermediate layer 50 forms a second functional interface 32. Advantageously, the step of forming the second intermediate layer 50 comprises a step of smoothing its free surface, with a view to step assembly.
    Prior to the assembly step, the trapping layer 30, having a first determined roughness, is formed on the support substrate 20. Then, the first intermediate layer 40 is formed on the trapping layer 30 (FIG. 7c). The interface between these two layers forms the functional interface 31 of determined roughness.
    Optionally, the first 40 and second 50 intermediate layers may be made of the same material.
    This variant of the manufacturing process then comprises the assembly of the first 40 and second 50 intermediate layers, advantageously by direct bonding, without this being taken in a limiting manner.
    A heat treatment can optionally be carried out to consolidate the bonding interface of the bonded structure 101.
    When the useful layer 10 is included in a donor substrate 11, a thinning step, as already stated above, is carried out, leading to the production of the hybrid structure 100 (FIG. 7e).
    Of course, the invention is not limited to the embodiments described and it is possible to make variant embodiments without departing from the scope of the invention as defined by the claims.
    权利要求:
    Claims (17)
    [1" id="c-fr-0001]
    1. Hybrid structure (100) for a surface acoustic wave device comprising a useful layer (10) of piezoelectric material having a first free face (1) and a second face (2) disposed on a support substrate (20) whose coefficient thermal expansion is lower than that of the useful layer (10), the hybrid structure (100) being characterized in that it comprises:
    • a trapping layer (30) interposed between the useful layer (10) and the support substrate (20);
    • at least one functional interface (31) of determined roughness between the useful layer (10) and the trapping layer (30).
    [2" id="c-fr-0002]
    2. Hybrid structure (100) for a surface acoustic wave device according to the preceding claim, in which the trapping layer (30) is directly in contact with the support substrate (20).
    [3" id="c-fr-0003]
    3. Hybrid structure (100) for a surface acoustic wave device according to one of the preceding claims, in which the trapping layer (30) is formed from a material chosen from amorphous silicon, polycrystalline silicon, amorphous or polycrystalline germanium.
    [4" id="c-fr-0004]
    4. Hybrid structure (100) for a surface acoustic wave device according to one of claims 1 to 2, in which the trapping layer (30) is formed by implantation in a surface layer of the support substrate (20) or by etching. and structuring the surface layer of the support substrate (20).
    [5" id="c-fr-0005]
    5. Hybrid structure (100) for a surface acoustic wave device according to one of the claims in which the functional roughness (31) has the preceding, the determined interface of a peak-to-valley amplitude greater than 0.3 microns.
    [6" id="c-fr-0006]
    6. Hybrid structure (100) for a surface acoustic wave device according to one of the preceding claims, in which the functional interface (31) is formed by the interface between the useful layer (10) and the trapping layer ( 30), the second face (2) of the useful layer (10) having the determined roughness.
    [7" id="c-fr-0007]
    7. Hybrid structure (100) for a surface acoustic wave device according to one of claims 1 to 5, in which the functional interface (31) is formed by the interface between a first intermediate layer (40), disposed on the second face (2) of the useful layer (10), and the trapping layer (30); the trapping layer (30) having the determined roughness.
    [8" id="c-fr-0008]
    8. Hybrid structure (100) for a surface acoustic wave device according to the preceding claim, in which the first intermediate layer (40) comprises a material chosen from silicon oxide, silicon nitride, silicon oxynitride, or a material of the same kind as that constituting the useful layer (10).
    [9" id="c-fr-0009]
    9. Hybrid structure (100) for a surface acoustic wave device according to one of the two preceding claims, comprising a second functional interface (32).
    [10" id="c-fr-0010]
    10. Hybrid structure (100) for a surface acoustic wave device according to the preceding claim, in which the second functional interface (32) is formed by the interface between the useful layer (10) and a second intermediate layer (50) disposed on the first intermediate layer (40); the second functional interface (32) having a second determined roughness whose peak-to-hollow amplitude is greater than 0.1 microns.
    [11" id="c-fr-0011]
    11. Hybrid structure (100) for a surface acoustic wave device according to the preceding claim, in which the second intermediate layer (50) comprises a material chosen from silicon oxide, silicon nitride, silicon oxynitride or a material of the same kind as that constituting the useful layer (10).
    Hybrid structure (10 surface acoustics previous claims, intermediate layer (40) intermediate layer (50) are formed) for wave device according to one of the two in which the first and second layers are of the same material.
    [12" id="c-fr-0012]
    13. Hybrid structure (100) for a surface acoustic wave device according to one of the preceding claims, in which the useful layer (10) comprises a piezoelectric material chosen from lithium tantalate (LiTaCh), lithium niobate (LiNbCh ), quartz, zinc oxide (ZnO), aluminum nitride (AIN).
    [13" id="c-fr-0013]
    14. Hybrid structure (100) for a surface acoustic wave device according to one of the preceding claims, in which the support substrate is a solid substrate or a composite substrate comprising at least one virgin layer or comprising all or part of micro- components. electronic.
    [14" id="c-fr-0014]
    15. Surface acoustic wave device (200) comprising a hybrid structure (100) according to one of the preceding claims.
    [15" id="c-fr-0015]
    16. Method for manufacturing a hybrid structure (100) for a surface acoustic wave device comprising:
    • A step of supplying a useful layer (10) of piezoelectric material comprising a first face (1) and a second face (2) having a determined roughness;
    • A step of supplying a support substrate (20) having a coefficient of thermal expansion lower than that of the useful layer (10);
    • An assembly step to arrange the useful layer (10) on the support substrate (20);
    The method being characterized in that it comprises, prior to the assembly step, a step of forming a trapping layer (30) on the second face (2) of the useful layer (10), the interface between the trapping layer (30) and the useful layer (10) forming a functional interface (31) of determined roughness; the assembly step taking place between the trapping layer (30) and the support substrate (20).
    [16" id="c-fr-0016]
    17. A method of manufacturing a hybrid structure (100) for a surface acoustic wave device comprising:
    • A step of supplying a useful layer (10) of piezoelectric material comprising a first face (1) and a second face (2);
    • A step of supplying a support substrate (20) having a coefficient of thermal expansion lower than that of the useful layer (10);
    • An assembly step to arrange the useful layer (10) on the support substrate (20);
    The method being characterized in that it comprises, prior to the assembly step:
    • A step of forming a trapping layer (30), having a determined roughness, on the support substrate (20);
    An intermediate step (40 'forming a first layer on the trapping layer (30), the interface between the trapping layer (30) and the first intermediate layer (40' forming a functional interface (31) of roughness determined,
    A method of manufacturing a hybrid structure (100) according to the preceding claim, wherein the step of useful interlayer assembly (10).
    takes place between the first layer '40) and the second face (2) of the layer
    [17" id="c-fr-0017]
    19. A method of manufacturing a hybrid structure (100) according to claim 17, comprising, prior to the assembly step, a step of forming a second intermediate layer (50) on the second face (2) of the useful layer (10) which has a second determined roughness, the assembly step taking place between the first intermediate layer (40) and the second intermediate layer (50); the interface between the useful layer (10) and the second intermediate layer (50) forming a second functional interface (32).
    1/8
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    同族专利:
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    EP3694008A1|2020-08-12|
    FR3053532B1|2018-11-16|
    WO2018002504A1|2018-01-04|
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    法律状态:
    2017-05-22| PLFP| Fee payment|Year of fee payment: 2 |
    2018-01-05| PLSC| Publication of the preliminary search report|Effective date: 20180105 |
    2018-05-25| PLFP| Fee payment|Year of fee payment: 3 |
    2020-05-20| PLFP| Fee payment|Year of fee payment: 5 |
    2021-05-27| PLFP| Fee payment|Year of fee payment: 6 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1656191A|FR3053532B1|2016-06-30|2016-06-30|HYBRID STRUCTURE FOR ACOUSTIC SURFACE WAVE DEVICE|
    FR1656191|2016-06-30|FR1656191A| FR3053532B1|2016-06-30|2016-06-30|HYBRID STRUCTURE FOR ACOUSTIC SURFACE WAVE DEVICE|
    EP21161536.4A| EP3859800A1|2016-06-30|2017-06-26|Hybrid structure for a device with surface acoustic waves|
    EP17745396.6A| EP3479421B1|2016-06-30|2017-06-26|Hybrid structure for a surface acoustic wave device|
    EP20165678.2A| EP3694008B1|2016-06-30|2017-06-26|Hybrid structure for a device with surface acoustic waves|
    KR1020197002818A| KR102367379B1|2016-06-30|2017-06-26|Hybrid Structures for Surface Acoustic Wave Devices|
    US16/313,804| US11159140B2|2016-06-30|2017-06-26|Hybrid structure for a surface acoustic wave device|
    PCT/FR2017/051701| WO2018002504A1|2016-06-30|2017-06-26|Hybrid structure for a surface acoustic wave device|
    JP2018568396A| JP2019526194A|2016-06-30|2017-06-26|Hybrid structure for surface acoustic wave devices|
    SG11201810569WA| SG11201810569WA|2016-06-30|2017-06-26|Hybrid structure for surface acoustic wave device|
    CN201780040275.XA| CN109417124A|2016-06-30|2017-06-26|Mixed structure for surface acoustic wave device|
    TW106121443A| TWI714785B|2016-06-30|2017-06-27|Hybrid structure for surface acoustic wave device|
    US16/922,758| US20200336127A1|2016-06-30|2020-07-07|Hybrid structure for a surface acoustic wave device|
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